Scalable fabrication of coupled NV center - photonic crystal cavity systems by self-aligned N ion implantation

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Authors
Schröder, Tim
Walsh, Michael
Zheng, Jiabao
Mouradian, Sara L.
Li, Luozhou
Malladi, Girish
Bakhru, Hassaram
Lu, Ming
Stein, Aaron
Issue Date
2017
Type
Article
Language
en_US
Keywords
diamond machining , photonic crystals , nanophotonics , photonic integrated circuits , integrated optics , quantum optics , quantum information processing
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Alternative Title
Optical Materials Express
Abstract
Towards building large-scale integrated photonic systems for quantum information processing, spatial and spectral alignment of single quantum systems to photonic nanocavities is required. Here, we demonstrate spatially targeted implantation of nitrogen vacancy (NV) centers into the mode maximum of 2-d diamond photonic crystal cavities with quality factors up to 8000, achieving an average of 1:1 0:2 NVs per cavity. Nearly all NV-cavity systems have significant emission intensity enhancement, reaching a cavity-fed spectrally selective intensity enhancement, Fint, of up to 93. Although spatial NV-cavity overlap is nearly guaranteed within about 40 nm, spectral tuning of the NV’s zero-phonon-line (ZPL) is still necessary after fabrication. To demonstrate spectral control, we temperature tune a cavity into an NV ZPL, yielding FZPL int ~ 5 at cryogenic temperatures.
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Citation
Schröder, T., Walsh, M., Zheng, J., Mouradian, S. L., Li, L., Malladi, G., . . . Englund, D. (2017). Scalable fabrication of coupled NV center - photonic crystal cavity systems by self-aligned N ion implantation. Optical Materials Express, 7(5), 1514-1524. doi:10.1364/OME.7.001514
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2017
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ISSN
2159-3930
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