Measurements of Friction and Wear in Chemical Mechanical Polishing Using Single Particle Analog Probes

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000000561.sbu.pdf (2.69 MB)

Issue Date

2009-05-01

Authors

Choi, Joo Hoon

Publisher

The Graduate School, Stony Brook University: Stony Brook, NY.

URI

http://hdl.handle.net/1951/48167

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Stony Brook Theses & Dissertations [SBU]

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