Measurement of periodicity and strain in arrays of single crystal silicon and pseudomorphic Si1-xGex/Si fin structures using x-ray reciprocal space maps

Date
2014Author
Medikonda, ManasaMuthinti, Gangadhara R.
Fronheiser, Jody
Kamineni, Vimal
Wormington, Matthew
Matney, Kevin
Adam, Thomas N.
Karapetrova, Evguenia
Diebold, Alain C.
Publisher
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and PhenomenaMetadata
Show full item recordSubject
nanotechnologytransitors
fin-based field effect transistors
pitch walking
Bragg diffraction peak
reciprocal space mapping