Show simple item record

dc.contributor.authorO’Mullane, Samuel
dc.contributor.authorPeterson, Brennan
dc.contributor.authorRace, Joseph
dc.contributor.authorKeller, Nick
dc.contributor.authorDiebold, Alain C.
dc.creator
dc.date.accessioned2017-05-15T13:59:57Z
dc.date.available2017-05-15T13:59:57Z
dc.date.issued2014
dc.identifier.citationO’Mullane, S., Peterson, B., Race, J., Keller, N., & Diebold, A. C. (2014). Enhancing one dimensional sensitivity with plasmonic coupling. Optics Express, 22(21), 26246-26253. doi:10.1364/OE.22.026246en_US
dc.identifier.issn1094-4087
dc.identifier.urihttp://hdl.handle.net/1951/69192
dc.description.abstractIn this paper, we propose a cross-grating structure to enhance the critical dimension sensitivity of one dimensional nanometer scale metal gratings. Making use of the interaction between slight changes in refractive index and localized plasmons, we demonstrate sub-angstrom scale sensitivity in this structure. Compared to unaltered infinite metal gratings and truncated finite gratings, this cross-grating structure shows robust spectra dependent mostly on the dimension of the smaller line width and pitch. While typical scatterometry simulations show angstrom resolution at best, this structure has demonstrated picometer resolution. Due to the wide range of acceptable specifications, we expect experimental confirmation of such structures to soon follow.en_US
dc.description.sponsorshipCollege of Nanoscale Science and Engineering,SUNY PI, Albany, New York 12203, USA Nanometrics Incorporated, Milpitas, California 95035, USAen_US
dc.language.isoen_USen_US
dc.publisherOptics Expressen_US
dc.subjectellipsometryen_US
dc.subjectpolarimetryen_US
dc.subjectplasmonicsen_US
dc.subjectscatterometryen_US
dc.subjectunconverged rigorous coupled wave approximation (RCWA)en_US
dc.subjectsimulationen_US
dc.titleEnhancing one dimensional sensitivity with plasmonic couplingen_US
dc.title.alternativeOptics Expressen_US
dc.typeArticleen_US


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record