Enhancing one dimensional sensitivity with plasmonic coupling: Erratum
Diebold, Alain C.
MetadataShow full item record
Subjectellipsometry; polarimetry; plasmonics; unconverged rigorous coupled wave approximation (RCWA); simulation
Our manuscript contained data from unconverged rigorous coupled wave approximation (RCWA) simulations that resulted in incorrect description of minima locations. Here, converged RCWA simulations are presented with corrected minima behavior described. The principle of plasmonic enhancement and its use in ellipsometric test structures is maintained.