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dc.contributor.authorSortland, Miriam
dc.contributor.authorHotalen, Jodi
dc.contributor.authorDel Re, Ryan
dc.contributor.authorPassarelli, James
dc.contributor.authorMurphy, Michael
dc.contributor.authorKulmala, Tero
dc.contributor.authorEkinci, Yasin
dc.contributor.authorNeisser, Mark
dc.contributor.authorFreedman, Daniel
dc.contributor.authorBrainard, Robert
dc.creator
dc.date.accessioned2016-12-29T18:35:00Z
dc.date.available2016-12-29T18:35:00Z
dc.date.issued2015-12-24
dc.identifier.citationSortland, M., Hotalen, J., Del Re, R., Passarelli, J., Murphy, M., Kulmala, T., & ... Brainard, R. (2015). Platinum and palladium oxalates: positive-tone extreme ultraviolet resists. Journal Of Micro/Nanolithography, MEMS, And MOEMS, 14(4), 043511. doi:10.1117/1.JMM.14.4.043511en_US
dc.identifier.issn1932-5150
dc.identifier.otherdoi:10.1117/1.JMM.14.4.043511
dc.identifier.urihttp://hdl.handle.net/1951/68699
dc.description.abstractHere, we present platinum and palladium mononuclear complexes with EUV photosensitivity and lithographic performance. Many platinum and palladium complexes show little or no EUV sensitivity; however, we have found that metal carbonates and metal oxalates (L2M(CO3) and L2M(C2O4); M = Pt or Pd) are sensitive to EUV. The metal carbonates give negative-tone behavior. The most interesting result is that the metal oxalates give the first positive-tone EUV resists based on mononuclear organometallic compounds. In particular, (dppm)Pd(C2O4) (dppm = 1,1-bis(diphenylphosphino)methane) (23) prints 30-nm dense lines with Esize of 50 mJ/cm2. Derivatives of (23) were synthesized to explore the relationship between the core metal and the resist sensitivity. The study showed that palladium-based resists are more sensitive than platinum-based resists. The photoreaction has been investigated for two of our most promising resists, (dppm)Pd(C2O4) (23) and (Ph2EtP)2PdC2O4 (27). Our experiments suggest the loss of CO2 and the formation of a zerovalent L4Pd complex upon exposure to light. We have identified dppm2Pd(δ(P)23:6) as the main photoproduct for (23) and (Ph2EtP)4Pd (δ(P)32:7) as the main photoproduct for (27).en_US
dc.publisherSociety of Photo-Optical Instrumentation Engineers (SPIE)en_US
dc.subjectpalladium oxalatesen_US
dc.subjectplatinum oxalatesen_US
dc.subjectpositive-tone extreme ultraviolet resistsen_US
dc.subjectpalladium mononuclear complexesen_US
dc.subjectplatinum mononuclear complexesen_US
dc.subjectEUV photosensitivityen_US
dc.subjectlithographic performanceen_US
dc.subjectphotoreactionen_US
dc.subjectmetal carbonatesen_US
dc.titlePlatinum and palladium oxalates: positive-tone extreme ultraviolet resistsen_US
dc.typeArticleen_US


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