Now showing items 1-2 of 2

    • Enhancing one dimensional sensitivity with plasmonic coupling 

      O’Mullane, Samuel; Peterson, Brennan; Race, Joseph; Keller, Nick; Diebold, Alain C. (Optics Express, 2014)
      In this paper, we propose a cross-grating structure to enhance the critical dimension sensitivity of one dimensional nanometer scale metal gratings. Making use of the interaction between slight changes in refractive index ...
    • Metrology for block copolymer directed self-assembly structures using Mueller matrixbased scatterometry 

      Dixit, Dhairya J.; Kamineni, Vimal; Farrell, Richard; Hosler, Erik R.; Preil, Moshe; Race, Joseph; Peterson, Brennan; Diebold, Alain C. (Journal of Micro/Nanolithography, MEMS, and MOEMS, 2015)
      Patterning based on directed self-assembly (DSA) of block copolymer (BCP) has been demonstrated to be a cost-effective manufacturing technique for advanced sub-20-nm structures. This paper describes the application of ...