Browsing SUNY Polytechnic Institute Faculty and Staff Research, Publications, and Creative Works by Subject "finite difference time domain"

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Level-set multilayer growth model for predicting printability of buried native extreme ultraviolet mask defects

Upadhyaya, Mihir; Basavalingappa, Adarsh; Herbol, Henry; Denbeaux, Gregory (American Vacuum Society, 2015-02-01)

The availability of defect-free masks is considered to be a critical issue for enabling extreme ultraviolet lithography (EUVL) as the next generation technology. Since completely defect-free masks will be hard to achieve, ...