Browsing SUNY Polytechnic Institute Faculty and Staff Research, Publications, and Creative Works by Subject "atomic force microscopy"
Now showing items 1-4 of 4
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Growth of strained InGaSb quantum wells for p-FET on Si: Defects, interfaces, and electrical properties
(Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 2014)A study of heteroepitaxial molecular beam epitaxy growth of strained p-channel InGaSb quantum well (QW) on lattice mismatched Si (100) using Al(Ga)Sb metamorphic buffers is presented in this paper. The migration enhanced ... -
Level-set multilayer growth model for predicting printability of buried native extreme ultraviolet mask defects
(Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 2016)The availability of defect-free masks is considered to be a critical issue for enabling extreme ultraviolet lithography (EUVL) as the next generation technology. Since completely defect-free masks will be hard to achieve, ... -
Level-set multilayer growth model for predicting printability of buried native extreme ultraviolet mask defects
(American Vacuum Society, 2015-02-01)The availability of defect-free masks is considered to be a critical issue for enabling extreme ultraviolet lithography (EUVL) as the next generation technology. Since completely defect-free masks will be hard to achieve, ... -
Surface oxidation of the topological insulator Bi2Se3
(Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2016)An understanding of the aging and oxidation of the (0001) surface of Bi2Se3 is critical to a comprehensive physical picture of its topologically protected surface states. Here, the authors contribute new experimental ...