Browsing SUNY Polytechnic Institute Faculty and Staff Research, Publications, and Creative Works by Subject "Thermodynamics"
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Rapid trench initiated recrystallization and stagnation in narrow Cu interconnect lines
(American Institute of Physics, 2015-09-01)Understanding and ultimately controlling the self-annealing of Cu in narrow interconnect lines has remained a top priority in order to continue down-scaling of back-end of the line interconnects. Recently, it was hypothesized ...
