Browsing SUNY Polytechnic Institute Faculty and Staff Research, Publications, and Creative Works by Subject "FEM accuracy"

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Modeling ellipsometric measurement of three-dimensional structures with rigorous coupled wave analysis and finite element method simulations

O’Mullane, Samuel; Keller, Nick; Diebold, Alain C. (Journal of Micro/Nanolithography, MEMS and MOEMS, 2016)

Using rigorous coupled wave analysis (RCWA) and finite element method (FEM) simulations together, many interesting ellipsometric measurements can be investigated. This work specifically focuses on simulating copper grating ...