Recent Submissions

  • Platinum and palladium oxalates: positive-tone extreme ultraviolet resists 

    Sortland, Miriam; Hotalen, Jodi; Del Re, Ryan; Passarelli, James; Murphy, Michael; Kulmala, Tero; Ekinci, Yasin; Neisser, Mark; Freedman, Daniel; Brainard, Robert (Society of Photo-Optical Instrumentation Engineers (SPIE), 2015-12-24)
    Here, we present platinum and palladium mononuclear complexes with EUV photosensitivity and lithographic performance. Many platinum and palladium complexes show little or no EUV sensitivity; however, we have found that ...
  • Rapid trench initiated recrystallization and stagnation in narrow Cu interconnect lines 

    O'Brien, Brendan; Rizzolo, Michael; Prestowitz, Luke; Dunn, Kathleen (American Institute of Physics, 2015-09-01)
    Understanding and ultimately controlling the self-annealing of Cu in narrow interconnect lines has remained a top priority in order to continue down-scaling of back-end of the line interconnects. Recently, it was hypothesized ...
  • Level-set multilayer growth model for predicting printability of buried native extreme ultraviolet mask defects 

    Upadhyaya, Mihir; Basavalingappa, Adarsh; Herbol, Henry; Denbeaux, Gregory (American Vacuum Society, 2015-02-01)
    The availability of defect-free masks is considered to be a critical issue for enabling extreme ultraviolet lithography (EUVL) as the next generation technology. Since completely defect-free masks will be hard to achieve, ...
  • Genetic Analysis of the Indri Reveals No Evidence of Distinct Subspecies 

    Brenneman, Rick; McLain, Adam; Taylor, Justin; Zaonarivelo, John; Lei, Runhua; McGuire, Susie; Andriantompohavana, Rambinintsoa; Rylands, Anthony; Louis Jr., Edward (Springer, 2016-07-25)
    Subspecies were traditionally defined by identifying gaps between phenotypes across the geographic range of a species, and may represent important units in the development of conservation strategies focused on preserving ...
  • Advancements in Real-Time Availability in Interlibrary Loan 

    Pritting, Shannon; Jones, William (Taylor and Francis, 2015-01)
    Determining if items are available is a major part of interlibrary loan work. Many libraries try to minimize staff time spent on determining availability by investing in circulation-based resource-sharing systems that ...
  • Struggling to start over: human rights challenges for Somali Bantu refugees in the United States 

    Coughlan, Reed; Stam, Kathryn; Kingston, Lindsey (Taylor and Francis, 2015-07-09)
    Despite persistent challenges to successful refugee resettlement in the United States, migration from Somalia has attracted little widespread attention from human rights scholars. Utilizing longitudinal data from qualitative ...