Recent Submissions

  • Process development for high resolution hydrogen silsesquioxane patterning using a commercial scanner for extreme ultraviolet lithography 

    Desai, Vishal; Mellish, Mac; Bennett, Stephen; Cady, Nathaniel (American Vacuum Society, 2017-02)
    The semiconductor industry is transitioning toward the use of extreme ultraviolet (EUV) lithography as a next generation patterning technology. There are currently only a limited number of high resolution EUV photoresists ...
  • Thermal coefficient of resistivity of ultrathin Ag films deposited on Cu for applications in emerging interconnect systems 

    Tatem, Elroy A.; Kaloyeros, Alain E.; Eisenbraun, Eric T. (Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 2014)
    As the semiconductor industry continues to scale feature sizes, scattering from phonons, surfaces, and grain boundaries results in a significant increase in metal interconnect resistivity. In this work, a thin Ag capping ...
  • Synthesis and properties of ferromagnetic nanostructures embedded within a high-quality crystalline silicon matrix via ion implantation and nanocavity assisted gettering processes 

    Malladi, Girish; Huang, Mengbing; Murray, Thomas; Novak, Steven; Matsubayashi, Akitomo; LaBella, Vincent; Bakhru, Hassaram (Journal of Applied Physics, 2014)
    Integrating magnetic functionalities with silicon holds the promise of developing, in the most dominant semiconductor, a paradigm-shift information technology based on the manipulation and control of electron spin and ...
  • Substrate dielectric effects on graphene field effect transistors 

    Hu, Zhaoying; Sinha, Dhiraj Prasad; Lee, Ji Ung; Liehr, Michael (Journal of Applied Physics, 2014)
    Graphene is emerging as a promising material for future electronics and optoelectronics applications due to its unique electronic structure. Understanding the graphene-dielectric interaction is of vital importance for the ...
  • Preparation of gallium nitride surfaces for atomic layer deposition of aluminum oxide 

    Kerr, A. J.; Chagarov, E.; Gu, S.; Kaufman-Osborn, T.; Madisetti, S.; Wu, J.; Asbeck, P. M.; Oktyabrsky, S.; Kummel, A. C. (Journal of Chemical Physics, 2014)
    A combined wet and dry cleaning process for GaN(0001) has been investigated with XPS and DFTMD modeling to determine the molecular-level mechanisms for cleaning and the subsequent nucleation of gate oxide atomic layer ...
  • Nucleotide Salvage Deficiencies, DNA Damage and Neurodegeneration 

    Fasullo, Michael; Endres, Laurel (International Journal of Molecular Sciences, 2015)
    Nucleotide balance is critically important not only in replicating cells but also in quiescent cells. This is especially true in the nervous system, where there is a high demand for adenosine triphosphate (ATP) produced ...
  • Nanoscale mapping of the W/Si(001) Schottky barrier 

    Durcan, Chris A.; Balsano, Robert; LaBella, Vincent P. (Journal of Applied Physics, 2014)
    The W/Si(001) Schottky barrier was spatially mapped with nanoscale resolution using ballistic electron emission microscopy (BEEM) and ballistic hole emission microscopy (BHEM) using n-type and p-type silicon substrates. ...
  • Level-set multilayer growth model for predicting printability of buried native extreme ultraviolet mask defects 

    Upadhyaya, Mihir; Basavalingappa, Adarsh; Herbol, Henry; Denbeaux, Gregory; Jindal, Vibhu; Harris-Jones, Jenah; Jang, Il-Yong; Goldberg, Kenneth A.; Mochi, Iacopo; Marokkey, Sajan; Demmerle, Wolfgang; Pistor, Thomas V. (Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 2016)
    The availability of defect-free masks is considered to be a critical issue for enabling extreme ultraviolet lithography (EUVL) as the next generation technology. Since completely defect-free masks will be hard to achieve, ...
  • Balanced Plateful: The Pyramid of Evidence 

    Hewitt, Rebecca Troendle (Association of College and Research Libraries, 2016)
    The Pyramid of Evidence is a hands-on, active learning exercise which helps students develop a framework with which to evaluate source authority in an academic setting and within discovery tools. It is interactive, rooted ...
  • Interface trap density and mobility extraction in InGaAs buried quantum well metal-oxide-semiconductor field-effect-transistors by gated Hall method 

    Chidambaram, Thenappan; Veksler, Dmitry; Madisetti, Shailesh; Greene, Andrew; Yakimov, Michael; Tokranov, Vadim; Hill, Richard; Oktyabrsky, Serge (Applied Physics Letters, 2014)
    In this work, we are using a gated Hall method for measurement of free carrier density and electron mobility in buried InGaAs quantum well metal-oxide-semiconductor field-effect-transistor channels. At room temperature, ...
  • Importance of growth direction in mid-infrared quantum cascade lasers 

    Bouzi, Pierre M.; Chiu, YenTing; Deutsch, Christoph; Dikmelik, Yamac; Song, Yu; Tokranov, Vadim; Oktyabrsky, Serge; Gmachl, Claire (Journal of Applied Physics, 2014)
    We report on the effect of growth direction on the performance of mid-infrared Quantum Cascade lasers. The design used has a symmetric active core, capable of operating under both negative and positive polarities, which ...
  • Growth of strained InGaSb quantum wells for p-FET on Si: Defects, interfaces, and electrical properties 

    Madisetti, Shailesh; Tokranov, Vadim; Greene, Andrew; Yakimov, Michael; Hirayama, Makoto; Oktyabrsky, Serge (Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 2014)
    A study of heteroepitaxial molecular beam epitaxy growth of strained p-channel InGaSb quantum well (QW) on lattice mismatched Si (100) using Al(Ga)Sb metamorphic buffers is presented in this paper. The migration enhanced ...
  • Disorder density of states in supported graphene 

    Lee, Ji Ung; Sinha, Dhiraj (Journal of Applied Physics, 2014)
    Transport in graphene is impacted by disorder. Disorder, which can occur on supported graphene, manifests as a significant shift in the Fermi level position from the charge neutrality point (Dirac point) and leads to ...
  • Platinum and palladium oxalates: positive-tone extreme ultraviolet resists 

    Sortland, Miriam; Hotalen, Jodi; Del Re, Ryan; Passarelli, James; Murphy, Michael; Kulmala, Tero; Ekinci, Yasin; Neisser, Mark; Freedman, Daniel; Brainard, Robert (Society of Photo-Optical Instrumentation Engineers (SPIE), 2015-12-24)
    Here, we present platinum and palladium mononuclear complexes with EUV photosensitivity and lithographic performance. Many platinum and palladium complexes show little or no EUV sensitivity; however, we have found that ...
  • Rapid trench initiated recrystallization and stagnation in narrow Cu interconnect lines 

    O'Brien, Brendan; Rizzolo, Michael; Prestowitz, Luke; Dunn, Kathleen (American Institute of Physics, 2015-09-01)
    Understanding and ultimately controlling the self-annealing of Cu in narrow interconnect lines has remained a top priority in order to continue down-scaling of back-end of the line interconnects. Recently, it was hypothesized ...
  • Level-set multilayer growth model for predicting printability of buried native extreme ultraviolet mask defects 

    Upadhyaya, Mihir; Basavalingappa, Adarsh; Herbol, Henry; Denbeaux, Gregory (American Vacuum Society, 2015-02-01)
    The availability of defect-free masks is considered to be a critical issue for enabling extreme ultraviolet lithography (EUVL) as the next generation technology. Since completely defect-free masks will be hard to achieve, ...
  • Genetic Analysis of the Indri Reveals No Evidence of Distinct Subspecies 

    Brenneman, Rick; McLain, Adam; Taylor, Justin; Zaonarivelo, John; Lei, Runhua; McGuire, Susie; Andriantompohavana, Rambinintsoa; Rylands, Anthony; Louis Jr., Edward (Springer, 2016-07-25)
    Subspecies were traditionally defined by identifying gaps between phenotypes across the geographic range of a species, and may represent important units in the development of conservation strategies focused on preserving ...
  • Advancements in Real-Time Availability in Interlibrary Loan 

    Pritting, Shannon; Jones, William (Taylor and Francis, 2015-01)
    Determining if items are available is a major part of interlibrary loan work. Many libraries try to minimize staff time spent on determining availability by investing in circulation-based resource-sharing systems that ...
  • Struggling to start over: human rights challenges for Somali Bantu refugees in the United States 

    Coughlan, Reed; Stam, Kathryn; Kingston, Lindsey (Taylor and Francis, 2015-07-09)
    Despite persistent challenges to successful refugee resettlement in the United States, migration from Somalia has attracted little widespread attention from human rights scholars. Utilizing longitudinal data from qualitative ...