Browsing Colleges of Nanoscale Science and Engineering Doctoral Dissertations by Subject "Dimensional metrology"

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  • Assessing a Multi-Electron Beam Application Approach for Semiconductor Process Metrology 

    Mukhtar, Maseeh; Thiel, Bradley; Dissertation Committee Chair; Bello, Abner; Dissertation Committee; Diebold, Alain; Dissertation Committee; Cady, Nathan; Dissertation Committee; Geer, Robert; Dissertation Committee; Sung, Woongje; Dissertation Committee (2018)
    Radical and disruptive technological approaches regularly require experimental prototypes be built, which is difficult to justify considering their oft-prohibitive requirements in terms of financial and/or time commitments. ...