Browsing SUNY Polytechnic Institute by Author "Shen, Ming Y."
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Modeling the copper microstructure and elastic anisotropy and studying its impact on reliability in nanoscale interconnects Basavalingappa, Adarsh; Shen, Ming Y.; Lloyd, James R. (Mechanics of Advanced Materials and Modern Processes, 2017)Copper is the primary metal used in integrated circuit manufacturing of today. Even though copper is face centered cubic it has significant mechanical anisotropy depending on the crystallographic orientations. Copper metal ...