Browsing SUNY Polytechnic Institute by Author "O’Mullane, Samuel"

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Enhancing one dimensional sensitivity with plasmonic coupling

O’Mullane, Samuel; Peterson, Brennan; Race, Joseph; Keller, Nick; Diebold, Alain C. (Optics Express, 2014)

In this paper, we propose a cross-grating structure to enhance the critical dimension sensitivity of one dimensional nanometer scale metal gratings. Making use of the interaction between slight changes in refractive index ...
Enhancing one dimensional sensitivity with plasmonic coupling: Erratum

O’Mullane, Samuel; Peterson, Brennan; Race, Joseph; Keller, Nick; Diebold, Alain C. (Optics Express, 2016)

Our manuscript contained data from unconverged rigorous coupled wave approximation (RCWA) simulations that resulted in incorrect description of minima locations. Here, converged RCWA simulations are presented with corrected ...
Modeling ellipsometric measurement of three-dimensional structures with rigorous coupled wave analysis and finite element method simulations

O’Mullane, Samuel; Keller, Nick; Diebold, Alain C. (Journal of Micro/Nanolithography, MEMS and MOEMS, 2016)

Using rigorous coupled wave analysis (RCWA) and finite element method (FEM) simulations together, many interesting ellipsometric measurements can be investigated. This work specifically focuses on simulating copper grating ...