Now showing items 1-2 of 2

    • Electronic structure, excitation properties, and chemical transformations of extreme ultra-violet resist materials 

      Rangan, Sylvie; Bartynski, Robert; Narasimhan, Amrit; Brainard, Robert (American Institute of Physics, 2017-07-12)
      The electronic structure of extreme ultra violet resist materials and of their individual components, two polymers and two photoacid generators (PAGs), is studied using a combination of x-ray and UV photoemission spectroscopies, ...
    • Platinum and palladium oxalates: positive-tone extreme ultraviolet resists 

      Sortland, Miriam; Hotalen, Jodi; Del Re, Ryan; Passarelli, James; Murphy, Michael; Kulmala, Tero; Ekinci, Yasin; Neisser, Mark; Freedman, Daniel; Brainard, Robert (Society of Photo-Optical Instrumentation Engineers (SPIE), 2015-12-24)
      Here, we present platinum and palladium mononuclear complexes with EUV photosensitivity and lithographic performance. Many platinum and palladium complexes show little or no EUV sensitivity; however, we have found that ...