Browsing SUNY Polytechnic Institute by Author "Bennett, Stephen"

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Process development for high resolution hydrogen silsesquioxane patterning using a commercial scanner for extreme ultraviolet lithography

Desai, Vishal; Mellish, Mac; Bennett, Stephen; Cady, Nathaniel (American Vacuum Society, 2017-02)

The semiconductor industry is transitioning toward the use of extreme ultraviolet (EUV) lithography as a next generation patterning technology. There are currently only a limited number of high resolution EUV photoresists ...