The purpose of the project is to produce high resolution pattern on titanium substrate. As we known, titanium, as an important material, has been widely used in medicine area, such as dental and orthopedic implants. Moreover, their integration in the bone is very good without fibrous interface layer. However, titanium and its alloys have certain limitations. It is possible that metal ions are released to the human environment. As a result, the release of these elements may lead to many problems such as local irritation of the tissues. Cell and tissue responses are influenced by the surface topography or roughness of the implants. In order to improve the biological, chemical, and mechanical properties, many surface treatment techniques are used. In this project, nanolithography is used to fabricate high resolution pattern on the titanium substrate. The phenomenon of phase segregation for block polymer is an important way for us to utilize to produce big height variation, which is crucial for us to construct high resolution pattern.