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dc.contributor.authorChoi, Joo Hoonen_US
dc.date.accessioned2010-08-18T13:51:19Zen_US
dc.date.available2010-08-18T13:51:19Zen_US
dc.date.issued2009-05-01en_US
dc.date.submittedMay 2008en_US
dc.identifier.urihttp://hdl.handle.net/1951/48167en_US
dc.description.sponsorshipStony Brook University Libraries. SBU Graduate School in Mechanical Engineering. Lawrence Martin (Dean of Graduate School), Dr. Chad S. Korach – Dissertation Advisor, Assistant Professor, Mechanical Engineering, Dr. Robert V. Kukta – Chairperson of Defense Associate Professor, Mechanical Engineering, Dr. Imin Kao – Member Professor, Mechanical Engineering, Dr. Joseph Levert – Outside Member Associate Professor at SUNY Maritime College, Mechanical Engineering.en_US
dc.formatElectronic Resource.en_US
dc.language.isoen_USen_US
dc.publisherThe Graduate School, Stony Brook University: Stony Brook, NY.en_US
dc.subject.otherlateral force microscopyen_US
dc.subject.otherLFMen_US
dc.subject.otherCMP polishing particleen_US
dc.subject.otherfrictionen_US
dc.titleMeasurements of Friction and Wear in Chemical Mechanical Polishing Using Single Particle Analog Probesen_US
dc.typeThesisen_US


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