Measurements of Friction and Wear in Chemical Mechanical Polishing Using Single Particle Analog Probes
| dc.contributor.author | Choi, Joo Hoon | en_US |
| dc.date.accessioned | 2010-08-18T13:51:19Z | en_US |
| dc.date.available | 2010-08-18T13:51:19Z | en_US |
| dc.date.issued | 2009-05-01 | en_US |
| dc.date.submitted | May 2008 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1951/48167 | en_US |
| dc.description.sponsorship | Stony Brook University Libraries. SBU Graduate School in Mechanical Engineering. Lawrence Martin (Dean of Graduate School), Dr. Chad S. Korach – Dissertation Advisor, Assistant Professor, Mechanical Engineering, Dr. Robert V. Kukta – Chairperson of Defense Associate Professor, Mechanical Engineering, Dr. Imin Kao – Member Professor, Mechanical Engineering, Dr. Joseph Levert – Outside Member Associate Professor at SUNY Maritime College, Mechanical Engineering. | en_US |
| dc.format | Electronic Resource. | en_US |
| dc.language.iso | en_US | en_US |
| dc.publisher | The Graduate School, Stony Brook University: Stony Brook, NY. | en_US |
| dc.subject.other | lateral force microscopy | en_US |
| dc.subject.other | LFM | en_US |
| dc.subject.other | CMP polishing particle | en_US |
| dc.subject.other | friction | en_US |
| dc.title | Measurements of Friction and Wear in Chemical Mechanical Polishing Using Single Particle Analog Probes | en_US |
| dc.type | Thesis | en_US |
