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dc.contributor.authorAllred, Claire Sheanen_US
dc.date.accessioned2010-08-09T17:58:42Zen_US
dc.date.available2010-08-09T17:58:42Zen_US
dc.date.issued2009-05-01en_US
dc.date.submittedMay 2008en_US
dc.identifier.urihttp://hdl.handle.net/1951/48149en_US
dc.description.sponsorshipStony Brook University Libraries. SBU Graduate School in Physics and Astronomy. Lawrence Martin (Dean of Graduate School), Harold Metcalf – Dissertation Advisor Professor, Department of Physics and Astronomy, Gorge Sterman – Chairperson of Defense Professor, Department of Physics and Astronomy, Clark McGrew Professor, Department of Physics and Astronomy, Jon Longtin Professor, Department of Mechanical Engineering SUNY Stony Brook.en_US
dc.formatElectronic Resource.en_US
dc.language.isoen_USen_US
dc.publisherThe Graduate School, Stony Brook University: Stony Brook, NY.en_US
dc.subject.otherneutral atom lithographyen_US
dc.titleNeutral Atom Lithography with Metastable Heliumen_US
dc.typeThesisen_US


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