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  • Modeling and Experimental Study of Wafer Manufacturing and Machining Processes 

    Chung, Chun-Hui (The Graduate School, Stony Brook University: Stony Brook, NY., 1-Aug-10)
    To achieve the stringent requirements for the future specification of wafers, the progress in wafering processes such as slicing, lapping, grinding, and polishing is critical. The improvement of the existing technology ...