Browsing by Author "Tatem, Elroy A."
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Thermal coefficient of resistivity of ultrathin Ag films deposited on Cu for applications in emerging interconnect systems
(Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 2014)As the semiconductor industry continues to scale feature sizes, scattering from phonons, surfaces, and grain boundaries results in a significant increase in metal interconnect resistivity. In this work, a thin Ag capping ...
