Browsing by Author "Diebold, Alain C."
Now showing items 1-12 of 12
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Atomic layer deposited ultrathin metal nitride barrier layers for ruthenium interconnect applications
(Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2017)Resistance capacitance time delay in Cu interconnects is becoming a significant factor requiring further performance improvements in future nanoelectronic devices. Choice of alternate interconnect materials, for example, ... -
Engineering crystallinity of atomic layer deposited gate stacks containing ultrathin HfO2 and a Ti-based metal gate: Effects of postmetal gate anneal and integration schemes
(Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 2014)In this study, the authors examined the effects of different annealing schemes on crystallinity in atomic layer deposition (ALD) grown Ti-containing metal gates and ultrathin ALD HfO2 high-k dielectric layers, and corresponding ... -
Enhancing one dimensional sensitivity with plasmonic coupling
(Optics Express, 2014)In this paper, we propose a cross-grating structure to enhance the critical dimension sensitivity of one dimensional nanometer scale metal gratings. Making use of the interaction between slight changes in refractive index ... -
Enhancing one dimensional sensitivity with plasmonic coupling: Erratum
(Optics Express, 2016)Our manuscript contained data from unconverged rigorous coupled wave approximation (RCWA) simulations that resulted in incorrect description of minima locations. Here, converged RCWA simulations are presented with corrected ... -
Measurement of periodicity and strain in arrays of single crystal silicon and pseudomorphic Si1-xGex/Si fin structures using x-ray reciprocal space maps
(Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 2014)Characterization of the periodicity and strain state of an array of lithographically patterned silicon and silicon-germanium alloy on silicon fins using reciprocal space mapping of Bragg diffraction peaks is presented. ... -
Metrology for block copolymer directed self-assembly structures using Mueller matrixbased scatterometry
(Journal of Micro/Nanolithography, MEMS, and MOEMS, 2015)Patterning based on directed self-assembly (DSA) of block copolymer (BCP) has been demonstrated to be a cost-effective manufacturing technique for advanced sub-20-nm structures. This paper describes the application of ... -
Modeling ellipsometric measurement of three-dimensional structures with rigorous coupled wave analysis and finite element method simulations
(Journal of Micro/Nanolithography, MEMS and MOEMS, 2016)Using rigorous coupled wave analysis (RCWA) and finite element method (FEM) simulations together, many interesting ellipsometric measurements can be investigated. This work specifically focuses on simulating copper grating ... -
Optical properties of pseudomorphic Ge1−xSnx (x = 0 to 0.11) alloys on Ge(001)
(Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 2014)The characterization of the optical properties of pseudomorphic Ge1-xSnx/Ge/Si (x=0 to 0.11) alloys from the IR to UV is presented. The Ge1-xSnx alloys were epitaxially grown on relaxed Ge grown on Si. Rutherford backscattering ... -
Role of Ge and Si substrates in higher-k tetragonal phase formation and interfacial properties in cyclical atomic layer deposition-anneal Hf1-xZrxO2/Al2O3 thin film stacks
(Journal of Applied Physics, 2016)Using a five-step atomic layer deposition (ALD)-anneal (DADA) process, with 20 ALD cycles of metalorganic precursors followed by 40 s of rapid thermal annealing at 1073 K, we have developed highly crystalline Hf1-xZrxO2 ... -
Surface oxidation of the topological insulator Bi2Se3
(Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2016)An understanding of the aging and oxidation of the (0001) surface of Bi2Se3 is critical to a comprehensive physical picture of its topologically protected surface states. Here, the authors contribute new experimental ... -
Tracking quintuple layer oxidation on cleaved Bi2Se3 by optical second-harmonic anisotropy
(Physical Review B, 2016)We find that the major and minor intensity lobes of a measured rotational-anisotropy pattern of optical second-harmonic generation (SHG) from a cleaved Bi2Se3 (111) surface can gradually change with time and eventually ... -
Transiently stimulated second-harmonic generation from silicon nanogratings
(American Physical Society, 2017-11-29)We observe that second-harmonic (SH) light generated by a femtosecond probe pulse from Si nanograting surfaces can be enhanced by a correlating pump pulse. Time-resolved anisotropy analysis shows that the enhancement arises ...
