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  • Platinum and palladium oxalates: positive-tone extreme ultraviolet resists 

    Sortland, Miriam; Hotalen, Jodi; Del Re, Ryan; Passarelli, James; Murphy, Michael; Kulmala, Tero; Ekinci, Yasin; Neisser, Mark; Freedman, Daniel; Brainard, Robert (Society of Photo-Optical Instrumentation Engineers (SPIE), 2015-12-24)
    Here, we present platinum and palladium mononuclear complexes with EUV photosensitivity and lithographic performance. Many platinum and palladium complexes show little or no EUV sensitivity; however, we have found that ...