Browsing by Author "Race, Joseph"

Now showing items 1-3 of 3

    • Enhancing one dimensional sensitivity with plasmonic coupling 

      O’Mullane, Samuel; Peterson, Brennan; Race, Joseph; Keller, Nick; Diebold, Alain C. (Optics Express, 2014)
      In this paper, we propose a cross-grating structure to enhance the critical dimension sensitivity of one dimensional nanometer scale metal gratings. Making use of the interaction between slight changes in refractive index ...

    • Enhancing one dimensional sensitivity with plasmonic coupling: Erratum 

      O’Mullane, Samuel; Peterson, Brennan; Race, Joseph; Keller, Nick; Diebold, Alain C. (Optics Express, 2016)
      Our manuscript contained data from unconverged rigorous coupled wave approximation (RCWA) simulations that resulted in incorrect description of minima locations. Here, converged RCWA simulations are presented with corrected ...

    • Metrology for block copolymer directed self-assembly structures using Mueller matrixbased scatterometry 

      Dixit, Dhairya J.; Kamineni, Vimal; Farrell, Richard; Hosler, Erik R.; Preil, Moshe; Race, Joseph; Peterson, Brennan; Diebold, Alain C. (Journal of Micro/Nanolithography, MEMS, and MOEMS, 2015)
      Patterning based on directed self-assembly (DSA) of block copolymer (BCP) has been demonstrated to be a cost-effective manufacturing technique for advanced sub-20-nm structures. This paper describes the application of ...